Friday, February 10, 2017

ANALYSIS OF POSSIBILITY OF GROWTH OF SEVERAL EPITAXIAL LAYERS SIMULTANEOUSLY IN GAS PHASES FRAMEWORK ONE TECHNOLOGICAL PROCESS. ON POSSIBILITY TO CHANGE PROPERTIES OF EPITAXIAL LAYERS

Author : E.L. Pankratov and E.A. Bulaeva
  

Volume, Issue, Month, Year :  Vol.6, No.1, January 2017

ABSTRACT

 We analyzed nonlinear model with varying in space and time coefficients of growth of epitaxial layers from gas phase in a vertical reactor with account native convection. We formulate several conditions to increase homogeneity of epitaxial layers with varying of technological process parameters.

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