Sunday, November 13, 2016

ANALYSIS OF MANUFACTURING OF VOLTAGE RESTORE TO INCREASE DENSITY OF ELEMENTS OF THE CIRCUIT

Author : E.L. Pankratov, E.A. Bulaeva
Volume, Issue, Month, Year : Vol (5), No (1/2/3/4), October, 2016

ABSTRACT



We introduce an approach for increasing density of voltage restore elements. The approach based on manufacturing of a heterostructure, which consist of a substrate and an epitaxial layer with special configuration.Several required sections of the layer should be doped by diffusion or ion implantation. After that dopants and/or radiation defects should be annealed.  


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